A multi-axis MEMS sensor with integrated carbon nanotube-based piezoresistors for nanonewton level force metrology.

نویسندگان

  • Michael A Cullinan
  • Robert M Panas
  • Martin L Culpepper
چکیده

This paper presents the design and fabrication of a multi-axis microelectromechanical system (MEMS) force sensor with integrated carbon nanotube (CNT)-based piezoresistive sensors. Through the use of proper CNT selection and sensor fabrication techniques, the performance of the CNT-based MEMS force sensor was increased by approximately two orders of magnitude as compared to current CNT-based sensor systems. The range and resolution of the force sensor were determined as 84 μN and 5.6 nN, respectively. The accuracy of the force sensor was measured to be better than 1% over the device's full range.

برای دانلود رایگان متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Nanonewton force-controlled manipulation of biological cells

As mechanical end-effectors, microgrippers enable the pick–transport–place of micrometer-sized objects, such as manipulation and positioning of biological cells in an aqueous environment. This paper reports on a monolithic MEMS-based microgripper with integrated force feedback along two axes and presents the first demonstration of forcecontrolled micro-grasping at the nanonewton force level. Th...

متن کامل

NanoNewton Force Sensing and Control in Microrobotic Cell Manipulation

Cellular force sensing and control techniques are capable of enhancing the dexterity and reliability of microrobotic cell manipulation systems. This paper presents a vision-based cellular force sensing technique using a microfabricated elastic cell holding device and a sub-pixel visual tracking algorithm for resolving forces down to 3.7nN during microrobotic mouse embryo injection. The techniqu...

متن کامل

System Level Modelling of CNT based Mechanical Sensor

This article presents a system level model of carbon nanotube (CNT) based mechanical sensor, which consists of micro-electro-mechanical (MEMS) platform that is served to actuate single-axis force and single CNT is placed between the movable and fixed electrodes. The change in conductivity of CNT, when strain is applied, is used to measure force or displacement. The simulation of the whole senso...

متن کامل

Multi-layer Embedment of Conductive and Non-conductive Pdms for All-elastomer Mems

PDMS (polydimethylsiloxane) elastomer is widely used in MEMS. However, PDMS is non-conductive and as a result is used in mostly structural applications. We report methods for monolithic integration of conductive and non-conductive PDMS for realizing wholly polymer-based devices with embedded elastomer wires, electrodes, heaters, and sensors. In this work we demonstrate elastomer strain gauges, ...

متن کامل

A Certain Electrochemical Nanosensor Based on Functionalized Multi-Walled Carbon Nanotube for Determination of Cysteine in the Presence of Paracetamol

The modified glassy carbon electrode (GCE) was prepared with 6-amino-4-(3,4-dihydroxyphenyl)-3-methyl-1,4-dihydropyrano[2,3-c]pyrazole-5-carbonitrile (pyrazole derivative (AMPC)) and functionalized multi-walled carbon nanotubes. In this research, electrocatalytic activity of nanocomposite (AMPC/MWCNTs) has been studied by cyclic voltammetry (CV), differential pulse voltammetry (DPV) and chronoa...

متن کامل

ذخیره در منابع من

ذخیره در منابع من قبلا به منابع من ذحیره شده

{@ msg_add @}


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

عنوان ژورنال:
  • Nanotechnology

دوره 23 32  شماره 

صفحات  -

تاریخ انتشار 2012